Picosecond laser micromachining prior to FIB milling for electronic microscopy sample preparation - CNRS - Centre national de la recherche scientifique
Journal Articles Applied Surface Science Year : 2017

Picosecond laser micromachining prior to FIB milling for electronic microscopy sample preparation

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Physics [physics]

Thierry Sarnet  : Connect in order to contact the contributor

https://cnrs.hal.science/hal-04844197

Submitted on : Tuesday, December 17, 2024-6:07:10 PM

Last modification on : Wednesday, December 18, 2024-3:27:47 AM

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hal-04844197 , version 1 (17-12-2024)

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Aurélien Sikora, Lahouari Fares, Jérôme Adrian, Vincent Goubier, Anne Delobbe, et al.. Picosecond laser micromachining prior to FIB milling for electronic microscopy sample preparation. Applied Surface Science, 2017, 418, pp.607-615. ⟨10.1016/j.apsusc.2016.12.009⟩. ⟨hal-04844197⟩

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