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Communication Dans Un Congrès Année : 2022

Raman spectroscopy and ellipsometry hybridization: application to GeSbTe crystallization measurement for in line control

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hal-03777907 , version 1 (15-09-2022)

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  • HAL Id : hal-03777907 , version 1

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Jon De Vecchy, Jean-Herve Tortai, Jérémy Moeyaert, Yannick Le Friec, Delphine Le Cunff, et al.. Raman spectroscopy and ellipsometry hybridization: application to GeSbTe crystallization measurement for in line control. ECASIA 2022, May 2022, Limerick, Ireland. ⟨hal-03777907⟩
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