Enhanced dielectric properties of epoxy-based photoresist nanocomposites using carbon-coated nickel nanoparticles for high voltage integrated capacitors

High-k nanocomposite photoresists are highly sought-after dielectric materials for the manufacturing and miniaturization of integrated capacitors. Herein, in-depth high voltage dielectric characterizations of Metal Polymer Composites (MPCs) having carbon-coated nickel nanoparticles (Ni@C) dispersed into epoxy-based photoresist (SU-8) are reported. ±0.38 MV/cm occurred. This study shows a reliable wafer-scale film fabrication process of MPCs for the manufacturing of long-awaited miniaturization of high-voltage capacitors.

Mots clés

Nano Composite Nano particles Core-shell nanostructures Dielectric properties Polymer-matrix composites

Domaines

Matériaux Micro et nanotechnologies/Microélectronique

Fichier principal

REVISITED - MPCs Epoxy based photoresist nanocomposites.pdf (1.51 Mo)

Origine	Fichiers produits par l'(les) auteur(s)

jean-hervé Tortai : Connectez-vous pour contacter le contributeur

https://cnrs.hal.science/hal-03367966

Soumis le : mercredi 6 octobre 2021-15:05:31

Dernière modification le : mardi 3 septembre 2024-11:16:05

Archivage à long terme le : vendredi 7 janvier 2022-19:08:32

Dates et versions

hal-03367966 , version 1 (06-10-2021)

Identifiants

HAL Id : hal-03367966 , version 1
DOI : 10.1016/j.compscitech.2021.109063

Citer

M.S. S Alfonso, C. Lapeyronie, M. Goubet, B. Viala, J. H. Tortai. Enhanced dielectric properties of epoxy-based photoresist nanocomposites using carbon-coated nickel nanoparticles for high voltage integrated capacitors. Composites Science and Technology, 2021, 216, pp.109063. ⟨10.1016/j.compscitech.2021.109063⟩. ⟨hal-03367966⟩

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