Enhanced dielectric properties of epoxy-based photoresist nanocomposites using carbon-coated nickel nanoparticles for high voltage integrated capacitors - Archive ouverte HAL Access content directly
Journal Articles Composites Science and Technology Year : 2021

Enhanced dielectric properties of epoxy-based photoresist nanocomposites using carbon-coated nickel nanoparticles for high voltage integrated capacitors

Abstract

High-k nanocomposite photoresists are highly sought-after dielectric materials for the manufacturing and miniaturization of integrated capacitors. Herein, in-depth high voltage dielectric characterizations of Metal Polymer Composites (MPCs) having carbon-coated nickel nanoparticles (Ni@C) dispersed into epoxy-based photoresist (SU-8) are reported. ±0.38 MV/cm occurred. This study shows a reliable wafer-scale film fabrication process of MPCs for the manufacturing of long-awaited miniaturization of high-voltage capacitors.
Fichier principal
Vignette du fichier
REVISITED - MPCs Epoxy based photoresist nanocomposites.pdf (1.51 Mo) Télécharger le fichier
Origin : Files produced by the author(s)

Dates and versions

hal-03367966 , version 1 (06-10-2021)

Identifiers

Cite

M.S. S Alfonso, C. Lapeyronie, M. Goubet, B. Viala, J. H. Tortai. Enhanced dielectric properties of epoxy-based photoresist nanocomposites using carbon-coated nickel nanoparticles for high voltage integrated capacitors. Composites Science and Technology, 2021, 216, pp.109063. ⟨10.1016/j.compscitech.2021.109063⟩. ⟨hal-03367966⟩
39 View
101 Download

Altmetric

Share

Gmail Facebook Twitter LinkedIn More