Hybridization of ellipsometry and energy loss spectra from XPS for bandgap and optical constants determination in SiON thin films - CNRS - Centre national de la recherche scientifique Accéder directement au contenu
Article Dans Une Revue Materials Chemistry and Physics Année : 2020

Hybridization of ellipsometry and energy loss spectra from XPS for bandgap and optical constants determination in SiON thin films

Résumé

Comparison of bandgap determination using ellipsometry and ELS-XPS. • Large energy bandgap difference between the two methods, up to 1.6 eV. • Combination of the two techniques, using a triple Tauc-Lorentz oscillator model. • Robust determination of the bandgap in the SiO 2-Si 3 N 4 system. • Method to measure n and k in a large energy range, from 1.5 up to 30 eV.
Fichier principal
Vignette du fichier
Manuscript - SURFCOAT-S-20-03635 - Revision Clean.pdf (834.53 Ko) Télécharger le fichier

Dates et versions

hal-03017737 , version 1 (01-12-2020)

Identifiants

Citer

Joao Resende, David Fuard, Delphine Le Cunff, Jean-Herve Tortai, Bernard Pelissier. Hybridization of ellipsometry and energy loss spectra from XPS for bandgap and optical constants determination in SiON thin films. Materials Chemistry and Physics, 2020, 259, pp.124000. ⟨10.1016/j.matchemphys.2020.124000⟩. ⟨hal-03017737⟩
58 Consultations
649 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More